Research on the Effect of Driving Voltage on the Performance of CMUT
QU Guang
LI Yunchao
ZHANG Yanjun
HE Changde
Abstract：As a kind of electrostatic device,the core of CMUT is variable capacitance,that is,the capacitance value is differ-ent under different voltage,so its output characteristics are directly related to the voltage bias applied.The performance of ultrasonic transducers to emit ultrasonic waves has an important impact on the depth measurement and image quality.Firstly,the internal structure and working principle of CMUT are introduced.By making CMUT devices,the emission performance of CMUT devices in silicone oil under different voltage driving conditions is tested.By electrostatic driving the transducer,applying AC voltage and DC voltage,based on the complex environment where CMUT may be applied,silicone oil is selected to test the CMUT's emission perfor-mance and parameters,including the C-V characteristics of CMUT,the sending voltage response stage and the receiving voltage amplitude.The test results show that CMUT has good transmitting and receiving performance in silicone oil.The combinations of DC bias and AC excitation voltage of CMUT are tested,and the experimental data are recorded and analyzed.Finally,the variation of cmut performance under different driving voltages is obtained.
Keywords：capacitive micromechanical ultrasonic transducer(CMUT)sending voltage response levelemission perfor-mancereceiving performanceC-V characteristics
Publication Date：2025-11-20
Online Publishing Date：2026-01-28(First online date of this platform, not the publication date of the document)
Pages：6( 185-189,210 )