Research on In-Situ Calibration Technology for Inertial MEMS Electrical Parameter Measurement System
XU Shengxi
WANG Heng
Abstract：To improve the calibration accuracy and efficiency of the electrical parameter measurement system for inertial MEMS devices,an in-situ calibration technique has been proposed,and a corresponding miniaturized calibration device has been developed.The in-situ calibration technique involves placing a custom-made standard source meter at the test location of the iner-tial MEMS device,ensuring the consistency between the test points and calibration points,and guaranteeing the complete loop cali-bration of the entire electrical parameter measurement system.The accompanying miniaturized calibration device is designed based on a software and hardware testing platform and an embedded computer control platform.By integrating various modules through a stacked structure,the device reduces noise interference and minimizes its volume,allowing it to perform tests in space-constrained environments.Comparative analysis shows that the in-situ calibration technique can significantly improve the calibration accuracy and efficiency of the electrical parameter measurement system for inertial MEMS devices,meeting the requirements of on-site cali-bration and providing reliable assurance for the high-precision application of inertial MEMS devices.
Keywords：inertial MEMS devicesin-situ calibration techniqueminiaturized calibration deviceelectrical parameter measurement systemmeasurement uncertainty
Publication Date：2025-11-20
Online Publishing Date：2026-01-28(First online date of this platform, not the publication date of the document)
Pages：6( 179-184 )