Design and Simulation of a High Temperature Thin-film Heat Flux Sensor
GONG Mingfeng
LEI Cheng
LIU Dong
BAI Yuehang
SHAO Boyou
XIE Yu
YU Jiangang
LIANG Ting
Abstract：To address the technical challenges associated with precise detection in extreme environments characterized by ul-tra-high temperatures and high heat flux,a dual-end symmetrical structure high-temperature thin film thermal flux sensor is de-signed.Based on finite element simulation method,the study analyzes the influence relationship between key structural parameters and the output voltage as well as the resistance to environmental interference performance.The simulation results demonstrate that under a heat flux density of 1 MW/m2,the optimized sensor exhibits a response voltage of 51.05 mV along with an environmental temperature interference coefficient immunity value of 0.082 mV/℃ and sensitivity value of 0.051 mV/(kW/m2),showcasing excep-tional response output capabilities as well as resistance against environmental interference.The sensor meets the needs of large heat flux measurements in high temperature environments up to 1 000 ℃.Moreover,this study provides valuable insights for advancing the development of high-performance thin film heat flux sensors.
Keywords：high temperatureheat fluxthin-film heat flux sensorfinite element simulation
Publication Date：2025-08-20
Online Publishing Date：2025-12-12(First online date of this platform, not the publication date of the document)
Pages：6( 94-99 )