High-resolution Tunneling Magneto-resistive Accelerometer with Subdivision Interpolation Technique
LI Wang
JIN Li
JING Ning
ZHONG Yujie
XIE Kunyang
Abstract：This paper presents the design simulation,process fabrication,and signal processing scheme of a tunnel magneto-resistive(TMR)accelerometer using subdivision interpolation technique.The feasibility of the principle is verified by modal simula-tion analysis of the accelerometer,while the structural parameters of the accelerometer are optimised to further improve the structur-al sensitivity.Secondly,the finite element simulation of the magnetic grid structure that generates the high rate of change magnetic field is carried out to determine the optimal grid period and detection height.Finally,it innovatively introduces the high-frequency interpolation technique to convert the sine-cosine output of the TMR sensor into an output that varies linearly with the induced accel-eration,so that a theoretical resolution of 80 mg can be achieved.
Keywords：MEMS accelerometertunneling magnetoresistancemagnetic gridssubdivision interpolation circuits
Publication Date：2025-07-20
Online Publishing Date：2025-09-25(First online date of this platform, not the publication date of the document)
Pages：5( 97-101 )