Influence of the feed-in power mode in VHF-PECVD system on the film uniformity
HU De-Zhi
WU Jin-Sui
GUAN Ai-Qiang
PENG Tao
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Publication Date：2016-01-01
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：5( 73-77 )