Wafer Cycle Time Prediction of IPSO-LSTM Considering Feature Learning

Home>Articles>Wafer Cycle Time Prediction of IPSO-LSTM Considering Feature Learning

ZHANG Lantian

SHI Yuqiang

Keywords：particle swam optimization algorithmproduction cycle timeauto-encoderlong short-term memory networkfeature learning

Publication Date：2023-06-28

Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)

Pages：8( 143-150 )

ISTIC

ISSN：1007-7375

Year, Vol.(Issue)：2023,26(3)