A Wafer Release Planning Simulation Optimization Method Based on Allocated Clearing Functions
YU Yihao
ZHANG Zhengmin
GUAN Zailin
Keywords：allocated clearing functionstwo-stage simulation optimizationwafer fabsproduction release planning
Publication Date：2023-06-28
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：9( 134-142 )