A Study of the Standard Deviation Change in the Wafer Thinning Process Based on the Multiscale Estimation Theory
LIU Yang
GAO Wenke
ZHANG Zhisheng
SHI Jinfei
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Publication Date：2018-01-01
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：7( 75-81 )