Investigation of GaN micro/nano-machining based on photoelectrochemical etching
MAI Man-fang
DU Liang
LIU Guo-hua
ZHU Chuan-yun
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Publication Date：2022-11-30
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：6( 28-33 )