Static testing technology of microstructure in micro electro mechanical systems
ZHAGN Li-ping
LU Qing-hua
Abstract：Micro geometry and mechanical parameters are mainly tested by static testing technology of Microstructure in MEMS, which directly influence the characteristics, interchangeability and motion of microstructure. So static testing has important significance. With the development of MEMS static testing technology has also renewed. In the paper static testing techniques of MEMS are analyzed systematically and application and testing range are discussed of various technologies of micro geometry and mechanical parameters. Noncontact optic testing technique is getting more attention and the micro-vision measurement will be the main development direction of static testing technology of Microstructure in MEMS.
Keywords：micro electro mechanical systems (MEMS)static testing technologymicro geometrymicro mechanical parametersthe micro-vision measurement
Publication Date：2015-01-01
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：5( 5-9 )