White light interferometry of MEMS devices
WANG Yu-hua
QUAN Cheng-gen
SHEN Lu
Abstract：The white light interferometry measurement method is suitable for measuring the three-dimensional surface topography of MEMS devices. By Matlab software simulation, discusses the advantages of using cubic spline interpolation in the local peak point interpolation method, from the measurement speed, accuracy, anti-noise areas, such as the ability to step and scan the local peak point interpolation method with Fourier transform filtering method, Hilbert transform, wavelet transform method for comparison. Finally, after processed by a median filter pretreatment, and local peak point interpolation method, the three-dimensional surface topography devices are given.
Keywords：MEMSwhite light interferometry3D surface topography
Publication Date：2014-01-01
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：5( 18-22 )