The recovery of the 3D surface profile of micro device through white-light interference
Abstract：White-light interference measurement is a very important method in optical measurement. In addition to the emphatical discussion of the process of this method conduction and related data processing, this paper introducedthe principle and the system of white-light interference measurement technology and proposed the method for the extraction of white-light interference signal envelop based on the interpolation of the local peak point. 3D surface profile images can he obtained through this method
Keywords：white-light interferenceenvelope3D surface profile
Publication Date：2012-01-01
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：5( 36-40 )