Research on the Preparation and Performance of Tungsten-diamond Transmission Target for Microfoucs X-ray Source
MA Yu-tian
LIU Jun-biao
NIU Geng
ZHAO Wei-xian
HAN Li
Abstract：The present paper designed a basic structure of tungsten-diamond transmission target, according to the theoretical model of the end-window transmission target formicro-focus X-ray source.The tungsten-diamond transmission targetis prepared by magnetron sputtering deposition technology. The microstructure of tungsten filmis analyzed by scanning electron microscope. The performance of tungsten-diamond transmission target is carried out on the X-ray tube of YXLON, and the performance is compared to that of YXLON.The experimental results show that the surface morphology of homemade targetis similar to that of YXLON.Under the same operating conditions,the X-ray emitting efficiencyis slightly higher about one percent than that of YXLON and the corresponding X-ray production powerof them is little difference, and the lifetime of homemade targetis longer than that of YXLON. All the above mention results indicate that homemade target could be satisfied the application requirements of high quality target formicro-focus X-ray source.
Keywords：micro-computed tomographymagnetron sputteringtungsten-diamond transmission targets
Publication Date：2017-01-01
Online Publishing Date：2025-08-15(First online date of this platform, not the publication date of the document)
Pages：6( 189-194 )